Application of quantum chemistry calculations in modeling chemical vapor deposition processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.

Bibliographic Details
Main Author:	Simka, Harsono Siem, 1969-
Other Authors:	Klavs F. Jensen.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/10065

Internet

http://hdl.handle.net/1721.1/10065