Doubling of block copolymer line patterns by electron-beam-fabricated templates

Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February 2015.

Bibliographic Details
Main Author:	Oser, Kameron L
Other Authors:	Karl K. Berggren.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2016
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/100689

Internet

http://hdl.handle.net/1721.1/100689