Photonic-electronic integration with polysilicon photonics in bulk CMOS

Photonic-electronic integration with polysilicon photonics in bulk CMOS

Here, I review the development of a polysilicon photonic platform that is optimized for integration with electronics fabricated on bulk silicon wafers. This platform enables large-scale monolithic integration of silicon photonics with microelectronics. A single-polysilicon deposition and lithography...

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Bibliographic Details
Main Author: Ram, Rajeev J.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: SPIE 2016
Online Access:http://hdl.handle.net/1721.1/101003
https://orcid.org/0000-0003-0420-2235

Internet

http://hdl.handle.net/1721.1/101003
https://orcid.org/0000-0003-0420-2235

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