Monolithic silicon photonics in a sub-100nm SOI CMOS microprocessor foundry: progress from devices to systems
We review recent progress of an effort led by the Stojanović (UC Berkeley), Ram (MIT) and Popović (CU Boulder) research groups to enable the design of photonic devices, and complete on-chip electro-optic systems and interfaces, directly in standard microelectronics CMOS processes in a microprocessor...
Main Authors: | , , , , , , , , , , , , , , , , |
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Format: | Article |
Language: | en_US |
Published: |
SPIE
2016
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Online Access: | http://hdl.handle.net/1721.1/101010 https://orcid.org/0000-0002-0259-5541 https://orcid.org/0000-0002-4403-956X https://orcid.org/0000-0002-1245-4179 https://orcid.org/0000-0001-6542-5606 https://orcid.org/0000-0003-0420-2235 https://orcid.org/0000-0002-5020-5472 |