Monolithic silicon photonics in a sub-100nm SOI CMOS microprocessor foundry: progress from devices to systems

We review recent progress of an effort led by the Stojanović (UC Berkeley), Ram (MIT) and Popović (CU Boulder) research groups to enable the design of photonic devices, and complete on-chip electro-optic systems and interfaces, directly in standard microelectronics CMOS processes in a microprocessor...

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Bibliographic Details
Main Authors: Wade, Mark T., Orcutt, Jason Scott, Shainline, Jeffrey M., Sun, Chen, Georgas, Michael, Moss, Benjamin Roy, Kumar, Rajesh, Alloatti, Luca, Pavanello, Fabio, Chen, Yu-Hsin, Nammari, Kareem, Notaros, Jelena, Ram, Rajeev J., Popovic, Milos A., Atabaki, Amir H., Leu, Jonathan Chung, Stojanovic, Vladimir
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: SPIE 2016
Online Access:http://hdl.handle.net/1721.1/101010
https://orcid.org/0000-0002-0259-5541
https://orcid.org/0000-0002-4403-956X
https://orcid.org/0000-0002-1245-4179
https://orcid.org/0000-0001-6542-5606
https://orcid.org/0000-0003-0420-2235
https://orcid.org/0000-0002-5020-5472

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