Study of gold diffusion kinetics in p/p+ epitaxial silicon

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

Bibliographic Details
Main Author:	Wu, Edward C. (Edward Chang-Hung), 1976-
Other Authors:	Lionel C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/10146

Internet

http://hdl.handle.net/1721.1/10146