Study of gold diffusion kinetics in p/p+ epitaxial silicon

Study of gold diffusion kinetics in p/p+ epitaxial silicon

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

Detalhes bibliográficos
Autor principal: Wu, Edward C. (Edward Chang-Hung), 1976-
Outros Autores: Lionel C. Kimerling.
Formato: Tese
Idioma:eng
Publicado em: Massachusetts Institute of Technology 2005
Assuntos:
Materials Science and Engineering
Acesso em linha:http://hdl.handle.net/1721.1/10146

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