Growth of erbium-doped Si/SiGe double heterostructures by ultra-high vacuum chemical vapor deposition

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.

Bibliographic Details
Main Author: Morse, Michael Ty
Other Authors: Lionel C. Kimerling.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/10380