Fabrication of capacitors based on silicon nanowire arrays generated by metal-assisted wet chemical etching

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 2016.

Bibliographic Details
Main Author:	Zheng, Wen, Ph. D. Massachusetts Institute of Technology
Other Authors:	Carl V. Thompson.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2016
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/104114

Internet

http://hdl.handle.net/1721.1/104114