Fabrication of capacitors based on silicon nanowire arrays generated by metal-assisted wet chemical etching

Fabrication of capacitors based on silicon nanowire arrays generated by metal-assisted wet chemical etching

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 2016.

Bibliographic Details
Main Author: Zheng, Wen, Ph. D. Massachusetts Institute of Technology
Other Authors: Carl V. Thompson.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2016
Subjects:
Materials Science and Engineering.
Online Access:http://hdl.handle.net/1721.1/104114

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