Multiscale modelling framework for the fracture of thin brittle polycrystalline films: application to polysilicon

Multiscale modelling framework for the fracture of thin brittle polycrystalline films: application to polysilicon

Micro-electro-mechanical systems (MEMS) made of polycrystalline silicon are widely used in several engineering fields. The fracture properties of polycrystalline silicon directly affect their reliability. The effect of the orientation of grains on the fracture behaviour of polycrystalline silicon is...

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Bibliographic Details
Main Authors: Vayrette, Renaud, Raskin, Jean-Pierre, Pardoen, Thomas, Galceran, Montserrat, Godet, Stéphane, Noels, Ludovic, Mulay, Shantanu S., Becker, Gauthier
Other Authors: Massachusetts Institute of Technology. Department of Aeronautics and Astronautics
Format: Article
Language:English
Published: Springer-Verlag 2016
Online Access:http://hdl.handle.net/1721.1/104882

Internet

http://hdl.handle.net/1721.1/104882

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