Plasma oxidation of silicon : kinetics studies

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.

Bibliographic Details
Main Author:	Chan, David Tai Wai
Other Authors:	L.R. Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2016
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/105010

Internet

http://hdl.handle.net/1721.1/105010