Plasma oxidation of silicon : kinetics studies
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2016
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| Online Access: | http://hdl.handle.net/1721.1/105010 |
| _version_ | 1826206079820759040 |
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| author | Chan, David Tai Wai |
| author2 | L.R. Reif. |
| author_facet | L.R. Reif. Chan, David Tai Wai |
| author_sort | Chan, David Tai Wai |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. |
| first_indexed | 2024-09-23T13:23:46Z |
| format | Thesis |
| id | mit-1721.1/105010 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:23:46Z |
| publishDate | 2016 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/1050102019-04-12T16:20:56Z Plasma oxidation of silicon : kinetics studies Chan, David Tai Wai L.R. Reif. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. Includes bibliographical references. by David Tai Wai Chan. M.S. 2016-10-25T19:49:11Z 2016-10-25T19:49:11Z 1984 1984 Thesis http://hdl.handle.net/1721.1/105010 11904716 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 106 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Chan, David Tai Wai Plasma oxidation of silicon : kinetics studies |
| title | Plasma oxidation of silicon : kinetics studies |
| title_full | Plasma oxidation of silicon : kinetics studies |
| title_fullStr | Plasma oxidation of silicon : kinetics studies |
| title_full_unstemmed | Plasma oxidation of silicon : kinetics studies |
| title_short | Plasma oxidation of silicon : kinetics studies |
| title_sort | plasma oxidation of silicon kinetics studies |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/105010 |
| work_keys_str_mv | AT chandavidtaiwai plasmaoxidationofsiliconkineticsstudies |