Dielectric Coating Thermal Stabilization During GaAs-Based Laser Fabrication for Improved Device Yield
The quality and yield of GaAs-based ridge waveguide devices fabricated at MIT Lincoln Laboratory were negatively impacted by the random lot-to-lot appearance of blisters in the front-side contact metal. The blisters signaled compromised adhesion between the front-side contact metal, underlying SiO2...
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Springer US
2016
|
| Online Access: | http://hdl.handle.net/1721.1/105859 |