Precision positioning using a novel six axes compliant nano-manipulator
In this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators’ arrangements. The compliant mechanism i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin Heidelberg
2016
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| Online Access: | http://hdl.handle.net/1721.1/105932 https://orcid.org/0000-0003-2244-8941 https://orcid.org/0000-0002-0503-8839 |