Precision positioning using a novel six axes compliant nano-manipulator
In this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators’ arrangements. The compliant mechanism i...
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| Other Authors: | |
| Format: | Article |
| Language: | English |
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Springer Berlin Heidelberg
2016
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| Online Access: | http://hdl.handle.net/1721.1/105932 https://orcid.org/0000-0003-2244-8941 https://orcid.org/0000-0002-0503-8839 |
| _version_ | 1826215121568923648 |
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| author | Akbari, Samin Pirbodaghi, Tohid |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Akbari, Samin Pirbodaghi, Tohid |
| author_sort | Akbari, Samin |
| collection | MIT |
| description | In this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators’ arrangements. The compliant mechanism is actuated by thermo-electro-mechanical actuators, as they could be integrated and exert large forces in a nanometer resolution. The actuators are bidirectional capable of applying force in both transverse and longitudinal directions. Performance of the two degrees of freedom actuator is thoroughly explored via numerical and analytical analyses, showing a good agreement. The workspace and performance of the precision positioner is studied using finite element methods. Finally, identification of forward and inverse kinematic of the nano-manipulator is performed utilizing neural network concept. A well-trained and appropriate neural network can efficiently replace the time-consuming and complex analytical and experimental methods. |
| first_indexed | 2024-09-23T16:16:53Z |
| format | Article |
| id | mit-1721.1/105932 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T16:16:53Z |
| publishDate | 2016 |
| publisher | Springer Berlin Heidelberg |
| record_format | dspace |
| spelling | mit-1721.1/1059322022-10-02T07:33:40Z Precision positioning using a novel six axes compliant nano-manipulator Akbari, Samin Pirbodaghi, Tohid Massachusetts Institute of Technology. Department of Mechanical Engineering Akbari, Samin Pirbodaghi, Tohid In this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators’ arrangements. The compliant mechanism is actuated by thermo-electro-mechanical actuators, as they could be integrated and exert large forces in a nanometer resolution. The actuators are bidirectional capable of applying force in both transverse and longitudinal directions. Performance of the two degrees of freedom actuator is thoroughly explored via numerical and analytical analyses, showing a good agreement. The workspace and performance of the precision positioner is studied using finite element methods. Finally, identification of forward and inverse kinematic of the nano-manipulator is performed utilizing neural network concept. A well-trained and appropriate neural network can efficiently replace the time-consuming and complex analytical and experimental methods. 2016-12-22T15:11:50Z 2017-03-01T16:14:49Z 2016-04 2016-03 2016-08-18T15:28:32Z Article http://purl.org/eprint/type/JournalArticle 0946-7076 1432-1858 http://hdl.handle.net/1721.1/105932 Akbari, Samin, and Tohid Pirbodaghi. “Precision Positioning Using a Novel Six Axes Compliant Nano-Manipulator.” Microsystem Technologies (2016): n. pag. https://orcid.org/0000-0003-2244-8941 https://orcid.org/0000-0002-0503-8839 en http://dx.doi.org/10.1007/s00542-016-2931-2 Microsystem Technologies Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. Springer-Verlag Berlin Heidelberg application/pdf Springer Berlin Heidelberg Springer Berlin Heidelberg |
| spellingShingle | Akbari, Samin Pirbodaghi, Tohid Precision positioning using a novel six axes compliant nano-manipulator |
| title | Precision positioning using a novel six axes compliant nano-manipulator |
| title_full | Precision positioning using a novel six axes compliant nano-manipulator |
| title_fullStr | Precision positioning using a novel six axes compliant nano-manipulator |
| title_full_unstemmed | Precision positioning using a novel six axes compliant nano-manipulator |
| title_short | Precision positioning using a novel six axes compliant nano-manipulator |
| title_sort | precision positioning using a novel six axes compliant nano manipulator |
| url | http://hdl.handle.net/1721.1/105932 https://orcid.org/0000-0003-2244-8941 https://orcid.org/0000-0002-0503-8839 |
| work_keys_str_mv | AT akbarisamin precisionpositioningusinganovelsixaxescompliantnanomanipulator AT pirbodaghitohid precisionpositioningusinganovelsixaxescompliantnanomanipulator |