Chamber matching in semiconductor manufacturing using statistical analysis and run-to-run control

Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2016.

Bibliographic Details
Main Author:	Haskaraman, Feyza
Other Authors:	Duane Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2017
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/107544

Internet

http://hdl.handle.net/1721.1/107544