Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices
The voltages at which microelectromechanical actuators and sensors become unstable, known as pull-in and lift-off voltages, are critical parameters in microelectromechanical systems (MEMS) design. The state-of-the-art MEMS simulators compute these parameters by simply swee...
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2017
|
| Online Access: | http://hdl.handle.net/1721.1/108090 https://orcid.org/0000-0002-5880-3151 |