Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices
The voltages at which microelectromechanical actuators and sensors become unstable, known as pull-in and lift-off voltages, are critical parameters in microelectromechanical systems (MEMS) design. The state-of-the-art MEMS simulators compute these parameters by simply swee...
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| פורמט: | Article |
| שפה: | en_US |
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Institute of Electrical and Electronics Engineers (IEEE)
2017
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| גישה מקוונת: | http://hdl.handle.net/1721.1/108090 https://orcid.org/0000-0002-5880-3151 |
| _version_ | 1826190029074989056 |
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| author | Zhang, Zheng Kamon, Mattan Daniel, Luca |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Zhang, Zheng Kamon, Mattan Daniel, Luca |
| author_sort | Zhang, Zheng |
| collection | MIT |
| description | The voltages at which microelectromechanical actuators and sensors become unstable, known as pull-in and lift-off voltages, are critical parameters in microelectromechanical systems (MEMS) design. The state-of-the-art MEMS simulators
compute these parameters by simply sweeping the voltage, leading to either excessively large computational cost or to convergence failure near the pull-in or lift-off points. This paper proposes to simulate the behavior at pull-in and lift-off employing
two continuation-based algorithms. The first algorithm appropriately adapts standard continuation methods, providing a complete set of static solutions. The second algorithm uses continuation to trace two kinds of curves and generates the sweep-up or sweep-down curves, which can provide more intuition for MEMS designers. The algorithms presented in this paper are robust and suitable for general-purpose industrial MEMS designs. Our algorithms have been implemented in a commercial MEMS/integrated circuits codesign tool, and their effectiveness is validated by comparisons against measurement data and the commercial finite-element/boundary-element (FEM/BEM) solver CoventorWare. |
| first_indexed | 2024-09-23T08:34:16Z |
| format | Article |
| id | mit-1721.1/108090 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T08:34:16Z |
| publishDate | 2017 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/1080902022-09-30T09:40:10Z Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices Zhang, Zheng Kamon, Mattan Daniel, Luca Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Computation for Design and Optimization Program Daniel, Luca Zhang, Zheng Kamon, Mattan Daniel, Luca The voltages at which microelectromechanical actuators and sensors become unstable, known as pull-in and lift-off voltages, are critical parameters in microelectromechanical systems (MEMS) design. The state-of-the-art MEMS simulators compute these parameters by simply sweeping the voltage, leading to either excessively large computational cost or to convergence failure near the pull-in or lift-off points. This paper proposes to simulate the behavior at pull-in and lift-off employing two continuation-based algorithms. The first algorithm appropriately adapts standard continuation methods, providing a complete set of static solutions. The second algorithm uses continuation to trace two kinds of curves and generates the sweep-up or sweep-down curves, which can provide more intuition for MEMS designers. The algorithms presented in this paper are robust and suitable for general-purpose industrial MEMS designs. Our algorithms have been implemented in a commercial MEMS/integrated circuits codesign tool, and their effectiveness is validated by comparisons against measurement data and the commercial finite-element/boundary-element (FEM/BEM) solver CoventorWare. 2017-04-13T12:03:56Z 2017-04-13T12:03:56Z 2014-10 Article http://purl.org/eprint/type/JournalArticle 1057-7157 1941-0158 http://hdl.handle.net/1721.1/108090 Zhang, Zheng, Mattan Kamon, and Luca Daniel. “Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices.” J. Microelectromech. Syst. 23, no. 5 (October 2014): 1084–1093. © 2014 https://orcid.org/0000-0002-5880-3151 en_US http://creativecommons.org/licenses/by-nc-sa/4.0/ Journal of Microelectromechanical Systems Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Institute of Electrical and Electronics Engineers (IEEE) Prof. Daniel via Phoebe Ayers |
| spellingShingle | Zhang, Zheng Kamon, Mattan Daniel, Luca Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices |
| title | Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices |
| title_full | Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices |
| title_fullStr | Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices |
| title_full_unstemmed | Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices |
| title_short | Continuation-Based Pull-In and Lift-Off Simulation Algorithms for Microelectromechanical Devices |
| title_sort | continuation based pull in and lift off simulation algorithms for microelectromechanical devices |
| url | http://hdl.handle.net/1721.1/108090 https://orcid.org/0000-0002-5880-3151 |
| work_keys_str_mv | AT zhangzheng continuationbasedpullinandliftoffsimulationalgorithmsformicroelectromechanicaldevices AT kamonmattan continuationbasedpullinandliftoffsimulationalgorithmsformicroelectromechanicaldevices AT danielluca continuationbasedpullinandliftoffsimulationalgorithmsformicroelectromechanicaldevices |