DSMC modeling of micromechanical devices

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 1995.

Bibliographic Details
Main Author:	Piekos, Edward S. (Edward Stanley)
Other Authors:	Kenneth S. Breuer.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Aeronautics and Astronautics
Online Access:	http://hdl.handle.net/1721.1/11149

Internet

http://hdl.handle.net/1721.1/11149