Novel machine learning approaches for modeling variations in semiconductor manufacturing

Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2017.

Bibliographic Details
Main Author:	Chen, Hongge, Ph. D. Massachusetts Institute of Technology
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2017
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/111911

Internet

http://hdl.handle.net/1721.1/111911