Process integration of erbium-doped silicon light-emitting diodes and MOSFETs

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.

Bibliographic Details
Main Author:	Zheng, Bo
Other Authors:	Lionel C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/11249

Internet

http://hdl.handle.net/1721.1/11249