Low-loss photonic device in Ge–Sb–S chalcogenide glass

Low-loss photonic device in Ge–Sb–S chalcogenide glass

Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low pr...

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Bibliographic Details
Main Authors: Novak, Spencer, Richardson, Kathleen, Du, Qingyang, Huang, Yizhong, Li, Junying, Kita, Derek M., Michon, Jerome, Lin, Hongtao, Li, Lan, Zhang, Wei, Hu, Juejun
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:en_US
Published: Optical Society of America 2017
Online Access:http://hdl.handle.net/1721.1/112647
https://orcid.org/0000-0002-1424-356X
https://orcid.org/0000-0003-0740-1344
https://orcid.org/0000-0002-4942-1709
https://orcid.org/0000-0002-7233-3918

Internet

http://hdl.handle.net/1721.1/112647
https://orcid.org/0000-0002-1424-356X
https://orcid.org/0000-0003-0740-1344
https://orcid.org/0000-0002-4942-1709
https://orcid.org/0000-0002-7233-3918

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