Low-loss photonic device in Ge–Sb–S chalcogenide glass
Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low pr...
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| Format: | Article |
| Language: | en_US |
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Optical Society of America
2017
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| Online Access: | http://hdl.handle.net/1721.1/112647 https://orcid.org/0000-0002-1424-356X https://orcid.org/0000-0003-0740-1344 https://orcid.org/0000-0002-4942-1709 https://orcid.org/0000-0002-7233-3918 |
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| author | Novak, Spencer Richardson, Kathleen Du, Qingyang Huang, Yizhong Li, Junying Kita, Derek M. Michon, Jerome Lin, Hongtao Li, Lan Zhang, Wei Hu, Juejun |
| author2 | Massachusetts Institute of Technology. Department of Materials Science and Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Materials Science and Engineering Novak, Spencer Richardson, Kathleen Du, Qingyang Huang, Yizhong Li, Junying Kita, Derek M. Michon, Jerome Lin, Hongtao Li, Lan Zhang, Wei Hu, Juejun |
| author_sort | Novak, Spencer |
| collection | MIT |
| description | Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (𝑄-factor) of 1.2×10⁶ were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices. |
| first_indexed | 2024-09-23T14:01:32Z |
| format | Article |
| id | mit-1721.1/112647 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T14:01:32Z |
| publishDate | 2017 |
| publisher | Optical Society of America |
| record_format | dspace |
| spelling | mit-1721.1/1126472022-09-28T17:47:17Z Low-loss photonic device in Ge–Sb–S chalcogenide glass Novak, Spencer Richardson, Kathleen Du, Qingyang Huang, Yizhong Li, Junying Kita, Derek M. Michon, Jerome Lin, Hongtao Li, Lan Zhang, Wei Hu, Juejun Massachusetts Institute of Technology. Department of Materials Science and Engineering Hu, Juejun Du, Qingyang Huang, Yizhong Li, Junying Kita, Derek M. Michon, Jerome Lin, Hongtao Li, Lan Zhang, Wei Hu, Juejun Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (𝑄-factor) of 1.2×10⁶ were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices. National Science Foundation (U.S.) (Award 1506605) National Science Foundation (U.S.) (Award 1453218) 2017-12-08T14:40:03Z 2017-12-08T14:40:03Z 2016-06 2016-06 Article http://purl.org/eprint/type/JournalArticle 0146-9592 1539-4794 http://hdl.handle.net/1721.1/112647 Du, Qingyang et al. “Low-Loss Photonic Device in Ge–Sb–S Chalcogenide Glass.” Optics Letters 41, 13 (June 2016): 3090-3093 © 2016 Optical Society of America https://orcid.org/0000-0002-1424-356X https://orcid.org/0000-0003-0740-1344 https://orcid.org/0000-0002-4942-1709 https://orcid.org/0000-0002-7233-3918 en_US https://doi.org/10.1364/OL.41.003090 Optics Letters Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Optical Society of America Prof. Hu via Erja Kajosalo |
| spellingShingle | Novak, Spencer Richardson, Kathleen Du, Qingyang Huang, Yizhong Li, Junying Kita, Derek M. Michon, Jerome Lin, Hongtao Li, Lan Zhang, Wei Hu, Juejun Low-loss photonic device in Ge–Sb–S chalcogenide glass |
| title | Low-loss photonic device in Ge–Sb–S chalcogenide glass |
| title_full | Low-loss photonic device in Ge–Sb–S chalcogenide glass |
| title_fullStr | Low-loss photonic device in Ge–Sb–S chalcogenide glass |
| title_full_unstemmed | Low-loss photonic device in Ge–Sb–S chalcogenide glass |
| title_short | Low-loss photonic device in Ge–Sb–S chalcogenide glass |
| title_sort | low loss photonic device in ge sb s chalcogenide glass |
| url | http://hdl.handle.net/1721.1/112647 https://orcid.org/0000-0002-1424-356X https://orcid.org/0000-0003-0740-1344 https://orcid.org/0000-0002-4942-1709 https://orcid.org/0000-0002-7233-3918 |
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