Low-loss photonic device in Ge–Sb–S chalcogenide glass
Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low pr...
| Main Authors: | , , , , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Optical Society of America
2017
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| Online Access: | http://hdl.handle.net/1721.1/112647 https://orcid.org/0000-0002-1424-356X https://orcid.org/0000-0003-0740-1344 https://orcid.org/0000-0002-4942-1709 https://orcid.org/0000-0002-7233-3918 |