In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.

Bibliographic Details
Main Author:	Salim, Sateria
Other Authors:	Klavs F. Jensen.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/11378

Internet

http://hdl.handle.net/1721.1/11378