In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/11378 |
| _version_ | 1826211514382548992 |
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| author | Salim, Sateria |
| author2 | Klavs F. Jensen. |
| author_facet | Klavs F. Jensen. Salim, Sateria |
| author_sort | Salim, Sateria |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995. |
| first_indexed | 2024-09-23T15:07:12Z |
| format | Thesis |
| id | mit-1721.1/11378 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:07:12Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/113782019-04-12T13:47:51Z In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition Salim, Sateria Klavs F. Jensen. Massachusetts Institute of Technology. Dept. of Chemical Engineering Chemical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995. Includes bibliographical references (leaves 179-186). by Sateria Salim. Ph.D. 2005-08-17T18:00:09Z 2005-08-17T18:00:09Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11378 33222409 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 187 leaves 11353678 bytes 11353436 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Chemical Engineering Salim, Sateria In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition |
| title | In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition |
| title_full | In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition |
| title_fullStr | In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition |
| title_full_unstemmed | In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition |
| title_short | In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition |
| title_sort | in situ fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition |
| topic | Chemical Engineering |
| url | http://hdl.handle.net/1721.1/11378 |
| work_keys_str_mv | AT salimsateria insitufouriertransforminfraredspectroscopyofchemistryandgrowthinchemicalvapordeposition |