Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.

Bibliographic Details
Main Author:	Hector, Scott D. (Scott Daniel)
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/11617

Internet

http://hdl.handle.net/1721.1/11617