Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.

Bibliografiset tiedot
Päätekijä:	Hector, Scott D. (Scott Daniel)
Muut tekijät:	Henry I. Smith.
Aineistotyyppi:	Opinnäyte
Kieli:	eng
Julkaistu:	Massachusetts Institute of Technology 2005
Aiheet:	Electrical Engineering and Computer Science
Linkit:	http://hdl.handle.net/1721.1/11617

Internet

http://hdl.handle.net/1721.1/11617