Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/11617 |
| _version_ | 1826211674375323648 |
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| author | Hector, Scott D. (Scott Daniel) |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Hector, Scott D. (Scott Daniel) |
| author_sort | Hector, Scott D. (Scott Daniel) |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. |
| first_indexed | 2024-09-23T15:09:43Z |
| format | Thesis |
| id | mit-1721.1/11617 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:09:43Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/116172019-04-10T10:31:36Z Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments Hector, Scott D. (Scott Daniel) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (leaves 263-274). by Scott D. Hector. Ph.D. 2005-08-16T23:03:03Z 2005-08-16T23:03:03Z 1994 1994 Thesis http://hdl.handle.net/1721.1/11617 32052989 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 274 leaves 21256978 bytes 21256732 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Hector, Scott D. (Scott Daniel) Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments |
| title | Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments |
| title_full | Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments |
| title_fullStr | Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments |
| title_full_unstemmed | Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments |
| title_short | Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments |
| title_sort | optimization of image formation in x ray lithography using rigorous electromagnetic theory and experiments |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/11617 |
| work_keys_str_mv | AT hectorscottdscottdaniel optimizationofimageformationinxraylithographyusingrigorouselectromagnetictheoryandexperiments |