Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments

Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.

Bibliographic Details
Main Author: Hector, Scott D. (Scott Daniel)
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/11617

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