Broad ion energy distributions in helicon wave-coupled helium plasma

Helium ion energy distributions were measured in helicon wave-coupled plasmas of the dynamics of ion implantation and sputtering of surface experiment using a retarding field energy analyzer. The shape of the energy distribution is a double-peak, characteristic of radiofrequency plasma potential mod...

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Bibliographic Details
Main Authors: Woller, Kevin Benjamin, Whyte, Dennis G, Wright, Graham
Other Authors: Massachusetts Institute of Technology. Department of Nuclear Science and Engineering
Format: Article
Published: American Institute of Physics (AIP) 2018
Online Access:http://hdl.handle.net/1721.1/117126
https://orcid.org/0000-0002-0450-9731
https://orcid.org/0000-0002-9001-5606