Broad ion energy distributions in helicon wave-coupled helium plasma
Helium ion energy distributions were measured in helicon wave-coupled plasmas of the dynamics of ion implantation and sputtering of surface experiment using a retarding field energy analyzer. The shape of the energy distribution is a double-peak, characteristic of radiofrequency plasma potential mod...
| Main Authors: | , , |
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| Format: | Article |
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American Institute of Physics (AIP)
2018
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| Online Access: | http://hdl.handle.net/1721.1/117126 https://orcid.org/0000-0002-0450-9731 https://orcid.org/0000-0002-9001-5606 |