Micro Motion Amplifiers for Compact Out-of-Plane Actuation

Micro Motion Amplifiers for Compact Out-of-Plane Actuation

Small-scale, out-of-plane actuators can enable tactile interfaces; however, achieving sufficient actuator force and displacement can require larger actuators. In this work, 2-mm<sup>2</sup> out-of-plane microactuators were created, and were demonstrated to output up to 6.3 µm of displace...

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Bibliographic Details
Main Authors: Xie, Xin, Bigdeli Karimi, Majid, Liu, Sanwei, Myanganbayar, Battushig, Livermore, Carol
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Published: Multidisciplinary Digital Publishing Institute (MDPI) 2018
Online Access:http://hdl.handle.net/1721.1/117141

Internet

http://hdl.handle.net/1721.1/117141

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