Micro Motion Amplifiers for Compact Out-of-Plane Actuation
Small-scale, out-of-plane actuators can enable tactile interfaces; however, achieving sufficient actuator force and displacement can require larger actuators. In this work, 2-mm<sup>2</sup> out-of-plane microactuators were created, and were demonstrated to output up to 6.3 µm of displace...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
Multidisciplinary Digital Publishing Institute (MDPI)
2018
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| Online Access: | http://hdl.handle.net/1721.1/117141 |