Automated mask aligner for multilevel mask exposures

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988.

Bibliographic Details
Main Author:	Owens, Anthony L. (Anthony LeRoy)
Other Authors:	Wilfred Veldkamp.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2018
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/117459

Internet

http://hdl.handle.net/1721.1/117459