Automated mask aligner for multilevel mask exposures
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2018
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| Online Access: | http://hdl.handle.net/1721.1/117459 |
| _version_ | 1811082892246253568 |
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| author | Owens, Anthony L. (Anthony LeRoy) |
| author2 | Wilfred Veldkamp. |
| author_facet | Wilfred Veldkamp. Owens, Anthony L. (Anthony LeRoy) |
| author_sort | Owens, Anthony L. (Anthony LeRoy) |
| collection | MIT |
| description | Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988. |
| first_indexed | 2024-09-23T12:12:06Z |
| format | Thesis |
| id | mit-1721.1/117459 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T12:12:06Z |
| publishDate | 2018 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/1174592019-04-12T23:07:51Z Automated mask aligner for multilevel mask exposures Owens, Anthony L. (Anthony LeRoy) Wilfred Veldkamp. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988. Includes bibliographical references. by Anthony L. Owens. B.S. 2018-08-22T14:28:49Z 2018-08-22T14:28:49Z 1988 1988 Thesis http://hdl.handle.net/1721.1/117459 19592129 eng MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission. http://dspace.mit.edu/handle/1721.1/7582 63 [i.e. 84] leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Owens, Anthony L. (Anthony LeRoy) Automated mask aligner for multilevel mask exposures |
| title | Automated mask aligner for multilevel mask exposures |
| title_full | Automated mask aligner for multilevel mask exposures |
| title_fullStr | Automated mask aligner for multilevel mask exposures |
| title_full_unstemmed | Automated mask aligner for multilevel mask exposures |
| title_short | Automated mask aligner for multilevel mask exposures |
| title_sort | automated mask aligner for multilevel mask exposures |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/117459 |
| work_keys_str_mv | AT owensanthonylanthonyleroy automatedmaskalignerformultilevelmaskexposures |