High-resolution transmission electron microscopy of III-V FinFETs

Thesis: S.B., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 2018.

Bibliographic Details
Main Author:	Kong, Lisa (Lisa Fanzhen)
Other Authors:	Jesús A. del Alamo and Lionel C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2018
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/119065

Internet

http://hdl.handle.net/1721.1/119065