Low-Frequency, Low-G MEMS Piezoelectric Energy Harvester
This paper reports the design, modeling and fabrication of a novel MEMS device for low-frequency, low-g vibration energy harvesting. The new design is based on bi-stable buckled beam structure. To implement the design at MEMS scale, we further proposed to employ residual stress in micro-fabricated t...
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| Format: | Article |
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IOP Publishing
2018
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| Online Access: | http://hdl.handle.net/1721.1/119790 https://orcid.org/0000-0002-3125-3268 https://orcid.org/0000-0001-6025-8538 |