Anomaly detection in semiconductor manufacturing through time series forecasting using neural networks

Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2018.

Bibliographic Details
Main Author:	Chen, Tiankai, M. Eng Massachusetts Institute of Technology
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2019
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/120245

Internet

http://hdl.handle.net/1721.1/120245