Analysis of polysilicon critical dimension variation for submicron CMOS processes

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.

Bibliographic Details
Main Author:	Fitzgerald, Dawn Dougherty
Other Authors:	Duane Boning, Charles Fine.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/12028

Internet

http://hdl.handle.net/1721.1/12028