Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task,...

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Bibliographic Details
Main Authors: Rangelow, Ivo W., Ivanov, Tzvetan, Ahmad, Ahmad, Kaestner, Marcus, Lenk, Claudia, Holz, Mathias, Reum, Alexander, Soltani Bozchalooi, Iman, Xia, Fangzhou, Youcef-Toumi, Kamal
Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering
Format: Article
Published: American Vacuum Society (AVS) 2019
Online Access:http://hdl.handle.net/1721.1/120345
https://orcid.org/0000-0002-6314-3717