Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication
With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task,...
| Main Authors: | , , , , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
American Vacuum Society (AVS)
2019
|
| Online Access: | http://hdl.handle.net/1721.1/120345 https://orcid.org/0000-0002-6314-3717 |
| _version_ | 1811084219673214976 |
|---|---|
| author | Rangelow, Ivo W. Ivanov, Tzvetan Ahmad, Ahmad Kaestner, Marcus Lenk, Claudia Holz, Mathias Reum, Alexander Soltani Bozchalooi, Iman Xia, Fangzhou Youcef-Toumi, Kamal |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Rangelow, Ivo W. Ivanov, Tzvetan Ahmad, Ahmad Kaestner, Marcus Lenk, Claudia Holz, Mathias Reum, Alexander Soltani Bozchalooi, Iman Xia, Fangzhou Youcef-Toumi, Kamal |
| author_sort | Rangelow, Ivo W. |
| collection | MIT |
| description | With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task, such as the feature aspect ratio, required range, or acceptable probe-sample interaction forces. In this paper, the authors discuss these requirements and the research directions that provide the highest potential in meeting them. The authors elaborate on the efforts toward the downsizing of self-sensed and self-actuated probes as well as on upscaling by active cantilever arrays. The authors present the fabrication process of active probes along with the tip customizations carried out targeting specific application fields. As promising application in scope of nanofabrication, field emission scanning probe lithography is introduced. The authors further discuss their control and design approach. Here, microactuators, e.g., multilayer microcantilevers, and macroactuators, e.g., flexure scanners, are combined in order to simultaneously meet both the range and speed requirements of a new generation of scanning probe microscopes. |
| first_indexed | 2024-09-23T12:47:11Z |
| format | Article |
| id | mit-1721.1/120345 |
| institution | Massachusetts Institute of Technology |
| last_indexed | 2024-09-23T12:47:11Z |
| publishDate | 2019 |
| publisher | American Vacuum Society (AVS) |
| record_format | dspace |
| spelling | mit-1721.1/1203452022-10-01T11:07:59Z Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication Rangelow, Ivo W. Ivanov, Tzvetan Ahmad, Ahmad Kaestner, Marcus Lenk, Claudia Holz, Mathias Reum, Alexander Soltani Bozchalooi, Iman Xia, Fangzhou Youcef-Toumi, Kamal Massachusetts Institute of Technology. Department of Mechanical Engineering Soltani Bozchalooi, Iman Xia, Fangzhou Youcef-Toumi, Kamal With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task, such as the feature aspect ratio, required range, or acceptable probe-sample interaction forces. In this paper, the authors discuss these requirements and the research directions that provide the highest potential in meeting them. The authors elaborate on the efforts toward the downsizing of self-sensed and self-actuated probes as well as on upscaling by active cantilever arrays. The authors present the fabrication process of active probes along with the tip customizations carried out targeting specific application fields. As promising application in scope of nanofabrication, field emission scanning probe lithography is introduced. The authors further discuss their control and design approach. Here, microactuators, e.g., multilayer microcantilevers, and macroactuators, e.g., flexure scanners, are combined in order to simultaneously meet both the range and speed requirements of a new generation of scanning probe microscopes. Seventh Framework Programme (European Commission) (Grant 318804) Thüringer Aufbaubank (Project 6343) 2019-02-12T19:02:46Z 2019-02-12T19:02:46Z 2017-11 2017-08 2019-01-15T16:30:05Z Article http://purl.org/eprint/type/JournalArticle 2166-2746 2166-2754 http://hdl.handle.net/1721.1/120345 Rangelow, Ivo W., Tzvetan Ivanov, Ahmad Ahmad, Marcus Kaestner, Claudia Lenk, Iman S. Bozchalooi, Fangzhou Xia, Kamal Youcef-Toumi, Mathias Holz, and Alexander Reum. “Review Article: Active Scanning Probes: A Versatile Toolkit for Fast Imaging and Emerging Nanofabrication.” Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 35, no. 6 (November 2017): 06G101. © 2017 Authors https://orcid.org/0000-0002-6314-3717 http://dx.doi.org/10.1116/1.4992073 Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena Creative Commons Attribution 4.0 International license https://creativecommons.org/licenses/by/4.0/ application/pdf American Vacuum Society (AVS) American Vacuum Society |
| spellingShingle | Rangelow, Ivo W. Ivanov, Tzvetan Ahmad, Ahmad Kaestner, Marcus Lenk, Claudia Holz, Mathias Reum, Alexander Soltani Bozchalooi, Iman Xia, Fangzhou Youcef-Toumi, Kamal Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication |
| title | Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication |
| title_full | Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication |
| title_fullStr | Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication |
| title_full_unstemmed | Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication |
| title_short | Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication |
| title_sort | review article active scanning probes a versatile toolkit for fast imaging and emerging nanofabrication |
| url | http://hdl.handle.net/1721.1/120345 https://orcid.org/0000-0002-6314-3717 |
| work_keys_str_mv | AT rangelowivow reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT ivanovtzvetan reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT ahmadahmad reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT kaestnermarcus reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT lenkclaudia reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT holzmathias reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT reumalexander reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT soltanibozchalooiiman reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT xiafangzhou reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication AT youceftoumikamal reviewarticleactivescanningprobesaversatiletoolkitforfastimagingandemergingnanofabrication |