Nano-beam and nano-target effects in ion radiation
Full three dimensional (3D) simulations of ion implantation are necessary in a wide range of nanoscience and nanotechnology applications to capture the increasing effect of ion leakage out of surfaces. Using a recently developed 3D Monte Carlo simulation code IM3D, we first quantify the relative err...
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Royal Society of Chemistry
2019
|
| Online Access: | http://hdl.handle.net/1721.1/120357 https://orcid.org/0000-0002-0025-5914 https://orcid.org/0000-0002-9216-2482 https://orcid.org/0000-0002-8547-0639 https://orcid.org/0000-0002-7841-8058 |