High-throughput three-dimensional lithographic microfabrication
A 3D lithographic microfabrication process has been developed that is high throughput, scalable, and capable of producing arbitrary patterns. It offers the possibility for industrial scale manufacturing of 3D microdevices such as photonic crystals, tissue engineering scaffolds, and microfluidics chi...
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| Format: | Article |
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The Optical Society
2019
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| Online Access: | http://hdl.handle.net/1721.1/120522 https://orcid.org/0000-0003-4698-6488 |