Design and fabrication of a microelectromechanical relay

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.

Bibliographic Details
Main Author: Liemke, Hans-Georg
Other Authors: Jeffrey H. Lang, Martin A. Schmidt.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/12150