Design and fabrication of a microelectromechanical relay
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.
Main Author: | Liemke, Hans-Georg |
---|---|
Other Authors: | Jeffrey H. Lang, Martin A. Schmidt. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/12150 |
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