Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit

This letter presents the first experimental study on capacitances, charges, and power-switching figure of merits (FOM) for a large-area vertical GaN power transistor. A 1.2-kV, 5-A GaN vertical power FinFET was demonstrated in a chip area of 0.45 mm2, with a specific on-resistance of 2.1 mΩ·cm2 and...

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Main Authors: Zhang, Yuhao, Sun, Min, Perozek, Joshua A., Liu, Zhihong, Zubair, Ahmad, Piedra, Daniel, Chowdhury, Nadim, Gao, Xiang, Shepard, Kenneth, Palacios, Tomas
Other Authors: Massachusetts Institute of Technology. Microsystems Technology Laboratories
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE) 2019
Online Access:https://hdl.handle.net/1721.1/121563
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author Zhang, Yuhao
Sun, Min
Perozek, Joshua A.
Liu, Zhihong
Zubair, Ahmad
Piedra, Daniel
Chowdhury, Nadim
Gao, Xiang
Shepard, Kenneth
Palacios, Tomas
author2 Massachusetts Institute of Technology. Microsystems Technology Laboratories
author_facet Massachusetts Institute of Technology. Microsystems Technology Laboratories
Zhang, Yuhao
Sun, Min
Perozek, Joshua A.
Liu, Zhihong
Zubair, Ahmad
Piedra, Daniel
Chowdhury, Nadim
Gao, Xiang
Shepard, Kenneth
Palacios, Tomas
author_sort Zhang, Yuhao
collection MIT
description This letter presents the first experimental study on capacitances, charges, and power-switching figure of merits (FOM) for a large-area vertical GaN power transistor. A 1.2-kV, 5-A GaN vertical power FinFET was demonstrated in a chip area of 0.45 mm2, with a specific on-resistance of 2.1 mΩ·cm2 and a threshold voltage of 1.3 V. Device junction capacitances were characterized and their main components were identified. This was used to calculate the switching charges and practical switching frequencies. Device FOMs were then derived that take into account the trade-offs between the conduction and switching power losses. Our GaN vertical FinFETs exhibit high-frequency (MHz) switching capabilities and superior switching FOMs when compared with commercial 0.9-1.2-kV Si and SiC power transistors. This letter shows the great potential of GaN vertical FinFETs for next-generation medium-voltage power electronics.
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spelling mit-1721.1/1215632022-09-28T00:15:09Z Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit Zhang, Yuhao Sun, Min Perozek, Joshua A. Liu, Zhihong Zubair, Ahmad Piedra, Daniel Chowdhury, Nadim Gao, Xiang Shepard, Kenneth Palacios, Tomas Massachusetts Institute of Technology. Microsystems Technology Laboratories Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science This letter presents the first experimental study on capacitances, charges, and power-switching figure of merits (FOM) for a large-area vertical GaN power transistor. A 1.2-kV, 5-A GaN vertical power FinFET was demonstrated in a chip area of 0.45 mm2, with a specific on-resistance of 2.1 mΩ·cm2 and a threshold voltage of 1.3 V. Device junction capacitances were characterized and their main components were identified. This was used to calculate the switching charges and practical switching frequencies. Device FOMs were then derived that take into account the trade-offs between the conduction and switching power losses. Our GaN vertical FinFETs exhibit high-frequency (MHz) switching capabilities and superior switching FOMs when compared with commercial 0.9-1.2-kV Si and SiC power transistors. This letter shows the great potential of GaN vertical FinFETs for next-generation medium-voltage power electronics. 2019-07-10T17:16:31Z 2019-07-10T17:16:31Z 2018-11 2019-07-01T13:30:51Z Article http://purl.org/eprint/type/JournalArticle 0741-3106 1558-0563 https://hdl.handle.net/1721.1/121563 Zhang, Yuhao et al. "Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit." IEEE Electron Device Letters 40, 1 (January 2019): 75 - 78 © 2018 IEEE en http://dx.doi.org/10.1109/led.2018.2880306 IEEE Electron Device Letters Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Institute of Electrical and Electronics Engineers (IEEE) Other repository
spellingShingle Zhang, Yuhao
Sun, Min
Perozek, Joshua A.
Liu, Zhihong
Zubair, Ahmad
Piedra, Daniel
Chowdhury, Nadim
Gao, Xiang
Shepard, Kenneth
Palacios, Tomas
Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit
title Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit
title_full Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit
title_fullStr Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit
title_full_unstemmed Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit
title_short Large Area 1.2 kV GaN Vertical Power FinFETs with a Record Switching Figure-of-Merit
title_sort large area 1 2 kv gan vertical power finfets with a record switching figure of merit
url https://hdl.handle.net/1721.1/121563
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