Design, fabrication, and characterization of an ultra-low cost inductively-coupled plasma chemical vapor deposition tool for micro- and nanofabrication

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2019

Bibliographic Details
Main Author:	Gould, Parker Andrew.
Other Authors:	Martin A. Schmidt.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2019
Subjects:	Electrical Engineering and Computer Science.
Online Access:	https://hdl.handle.net/1721.1/122561

Internet

https://hdl.handle.net/1721.1/122561