Design, fabrication, and characterization of an ultra-low cost inductively-coupled plasma chemical vapor deposition tool for micro- and nanofabrication
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2019
Main Author: | Gould, Parker Andrew. |
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Other Authors: | Martin A. Schmidt. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2019
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Subjects: | |
Online Access: | https://hdl.handle.net/1721.1/122561 |
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