A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy

A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy

In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrys...

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Bibliographic Details
Main Authors: Cometto, Olivier, Dennett, Cody Andrew, Tsang, Siu Hon, Teo, Edwin H.T., Short, Michael P
Other Authors: Massachusetts Institute of Technology. Department of Nuclear Science and Engineering
Format: Article
Language:en_US
Published: Elsevier BV 2020
Online Access:https://hdl.handle.net/1721.1/123893

Internet

https://hdl.handle.net/1721.1/123893

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